Etch of gallium nitride and other III-IV materials using a novel high-density plasma configuration

TsungNane Kuo; JuiHung Yeh; Hong-Ji Lee; ChingAn Chen; GuangKai Jeng; ChingPiao Lin

doi:10.1117/12.392123

11 July 2000 Etch of gallium nitride and other III-IV materials using a novel high-density plasma configuration

TsungNane Kuo, JuiHung Yeh, Hong-Ji Lee, ChingAn Chen, GuangKai Jeng, ChingPiao Lin

Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000) https://doi.org/10.1117/12.392123
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

Implementation of a novel high-density plasma configuration has led to high etch rates of various opto-electronic device structures. The etch rate for multiple quantum well GaN/GaInN structures exceeds 7500A/min, and that for AlGaInP/GaInP structure is over 4.5 micron/min with near-vertical profile. Discussion will cover the analysis of the etch-rate, micro- morphology, etch-profile and selectivity with respect to the influence by various process parameters. Deep-etch for over 20 microns with photoresist as the protection layer has been achieved, which resulted in nearly 90-degree profile.

Citation Download Citation

TsungNane Kuo, JuiHung Yeh, Hong-Ji Lee, ChingAn Chen, GuangKai Jeng, and ChingPiao Lin "Etch of gallium nitride and other III-IV materials using a novel high-density plasma configuration", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392123

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available