Low-dielectric-constant photoresists for insulation on TFT array

Rong-Jer Lee; YouCheng Wu; ShihLieh Chen; Song-Shiang Lin; HsienWen Chien

doi:10.1117/12.392115

11 July 2000 Low-dielectric-constant photoresists for insulation on TFT array

Rong-Jer Lee, YouCheng Wu, ShihLieh Chen, Song-Shiang Lin, HsienWen Chien

Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000) https://doi.org/10.1117/12.392115
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

This paper describes a low dielectric constant, high resolution and high brightness single layer positive photoresist on TFT array. A currently used positive photoresist comprising of low dielectric constant materials and a chemically amplified resis system is designed for the insulation layer on TFT array to enlarge pixel aperture ration of TFT-LCD.

Citation Download Citation

Rong-Jer Lee, YouCheng Wu, ShihLieh Chen, Song-Shiang Lin, and HsienWen Chien "Low-dielectric-constant photoresists for insulation on TFT array", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392115

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