Multiwavelength monitoring of thin film growth using a fiber spectrometer

Wayne G. Sainty; David W. Sainty

doi:10.1117/12.404756

19 October 2000 Multiwavelength monitoring of thin film growth using a fiber spectrometer

Wayne G. Sainty, David W. Sainty

Proceedings Volume 4094, Optical and Infrared Thin Films; (2000) https://doi.org/10.1117/12.404756
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We report here on a novel optical thin film monitoring technique. The instrument has been developed to improve the spectral performance of multilayer stacks by monitoring the instantaneous spectral performance over a wide wavelength band. Use is made of two commercially available miniature fibre spectrometers to cover the band 200 nm to 1 μm. A special software program has been written to read in the data from dual spectrometers and display the data to the monitor. For each layer, the real time data is compared to a calculated spectral performance to assist with the correct film thickness termination. The system stability is assisted by continuous referencing of the lamp emission spectrum. Very complex multilayers can be reliably deposited using the technique.

Citation Download Citation

Wayne G. Sainty and David W. Sainty "Multiwavelength monitoring of thin film growth using a fiber spectrometer", Proc. SPIE 4094, Optical and Infrared Thin Films, (19 October 2000); https://doi.org/10.1117/12.404756

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