Effective error reduction method in phase-shifting interferometer

Yingjie Yu; Chunlong Wei; Mingyi Chen; Hongwei Guo

doi:10.1117/12.498409

7 March 2006 Effective error reduction method in phase-shifting interferometer

Yingjie Yu, Chunlong Wei, Mingyi Chen, Hongwei Guo

Proceedings Volume 4101, Laser Interferometry X: Techniques and Analysis; (2006) https://doi.org/10.1117/12.498409
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

In phase-shifting interferometer, software processing method is a very important means to achieve high accuracy. By analyzing and simulating, it is indicated that only removing the effect of the error which has a spatial frequency of twice the fringe frequency in the result is not enough, especially in high accuracy measuring. The paper presents an averaging method to reduce the effect of errors. Testing results testify this averaging method is effective and robust.

Citation Download Citation

Yingjie Yu, Chunlong Wei, Mingyi Chen, and Hongwei Guo "Effective error reduction method in phase-shifting interferometer", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); https://doi.org/10.1117/12.498409

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