Accurate multilayer period determination with laser plasma water-window reflectometer

Goeran A. Johansson; Magnus Berglund; Fredrik Eriksson; Jens Birch; Hans M. Hertz

doi:10.1117/12.405907

2 November 2000 Accurate multilayer period determination with laser plasma water-window reflectometer

Goeran A. Johansson, Magnus Berglund, Fredrik Eriksson, Jens Birch, Hans M. Hertz

Proceedings Volume 4144, Advances in Laboratory-based X-Ray Sources and Optics; (2000) https://doi.org/10.1117/12.405907
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

This paper describes a new method for improved determination of multilayer period using a soft x-ray reflectometer based on a line-emitting high-brightness water-window liquid-jet laser- plasma source. The use of line emission with well-known wavelengths allows accurate measurements of multilayer period without source monochromatization and calibration. By using a new multi-line data analysis procedure the multilayer period of W/B₄C mirrors can be determined with an accuracy of 0.001 nm.

Citation Download Citation

Goeran A. Johansson, Magnus Berglund, Fredrik Eriksson, Jens Birch, and Hans M. Hertz "Accurate multilayer period determination with laser plasma water-window reflectometer", Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); https://doi.org/10.1117/12.405907

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