McCarter superfinish grinding for silicon: an update

Frank M. Anthony; Ali M. Khounsary; Douglas R. McCarter; S. Felix Krasnicki; Matt Tangedahl

doi:10.1117/12.411655

5 January 2001 McCarter superfinish grinding for silicon: an update

Frank M. Anthony, Ali M. Khounsary, Douglas R. McCarter, S. Felix Krasnicki, Matt Tangedahl

Proceedings Volume 4145, Advances in X-Ray Optics; (2001) https://doi.org/10.1117/12.411655
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A grinding technique referred to as the McCarter Superfinish, for grinding large-size optical components is discussed and certain surface characterization information about flatness and the relative magnitude of the subsurface damage in silicon substrates is reported. The flatness measurements were obtained with a Wyko surface analyzer, and the substrate damage measurements were made by x-ray diffraction and acid etching. Results indicate excellent control of flatness and fine surface finish. X-ray measurements show that the diamond wheels with small particle sizes used in the final phases of the grinding operation renders surfaces with relatively small subsurface damage.

Citation Download Citation

Frank M. Anthony, Ali M. Khounsary, Douglas R. McCarter, S. Felix Krasnicki, and Matt Tangedahl "McCarter superfinish grinding for silicon: an update", Proc. SPIE 4145, Advances in X-Ray Optics, (5 January 2001); https://doi.org/10.1117/12.411655

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