High-resolution soft x-ray microscopy

Weilun Chao; Erik H. Anderson; Gregory Denbeaux; Bruce D. Harteneck; Mark A. LeGros; Angelic L. Pearson; Deirdre L. Olynick; David T. Attwood Jr.

doi:10.1117/12.406671

8 November 2000 High-resolution soft x-ray microscopy

Weilun Chao, Erik H. Anderson, Gregory Denbeaux, Bruce D. Harteneck, Mark A. LeGros, Angelic L. Pearson, Deirdre L. Olynick, David T. Attwood Jr.

Author Affiliations +

Proceedings Volume 4146, Soft X-Ray and EUV Imaging Systems; (2000) https://doi.org/10.1117/12.406671
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The XM-1 is a soft x-ray full-field microscope that uses zone plates for the condenser and objective lenses. One of the main features of XM-1 is the high spatial resolution, which is made possible by the fine features of the objective zone plate. At present, the microscope uses a zone plate with an outer zone width of 25 nm. Several test patterns containing periodic lines and spaces were fabricated to measure the resolution of the microscope. Experimental data shows that the microscope can resolved 25 nm features. As simulations indicate that good contrast can be observed with even smaller features, test patterns with finer features are being fabricated to actually determine the resolution limit of the microscope.

Citation Download Citation

Weilun Chao, Erik H. Anderson, Gregory Denbeaux, Bruce D. Harteneck, Mark A. LeGros, Angelic L. Pearson, Deirdre L. Olynick, and David T. Attwood Jr. "High-resolution soft x-ray microscopy", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406671

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available