Optoelectronic methods for detecting a surface defect and estimation of their parameters by coherent illumination

Dmitry K. Proskurin; V. G. Khromykh; A. S. Orlov

doi:10.1117/12.413754

30 January 2001 Optoelectronic methods for detecting a surface defect and estimation of their parameters by coherent illumination

Dmitry K. Proskurin, V. G. Khromykh, A. S. Orlov

Author Affiliations +

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413754
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

Perspective of using the optoelectronic methods for remote monitoring of the quality of products surfaces is connected first of all with the possibility of their functioning in the real time. The fact, in its turn, allows one to use the information from such devices in the feedback channels of process control system when there is a need to receive surfaces with the given properties.

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Dmitry K. Proskurin, V. G. Khromykh, and A. S. Orlov "Optoelectronic methods for detecting a surface defect and estimation of their parameters by coherent illumination", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413754

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