Low-power micromachined structures for gas sensors with improved robustness

Isabel Gracia; Andreas Goetz; Jose Antonio Plaza; Carles Cane; Patrice Roetsch; Harald Boettner; Klaus Seibert

doi:10.1117/12.395637

15 August 2000 Low-power micromachined structures for gas sensors with improved robustness

Isabel Gracia, Andreas Goetz, Jose Antonio Plaza, Carles Cane, Patrice Roetsch, Harald Boettner, Klaus Seibert

Proceedings Volume 4176, Micromachined Devices and Components VI; (2000) https://doi.org/10.1117/12.395637
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Current research on microstructures for semiconductor gas sensors is on development on low power and robust substrates. In this paper a microstructure based on the combination of micromachined silicon substrates and glass wafers is presented. This device shows high robustness and can reach high temperatures up to 700$DEGC with good power consumption. The optimisation of the design and the process fabrication is described.

Citation Download Citation

Isabel Gracia, Andreas Goetz, Jose Antonio Plaza, Carles Cane, Patrice Roetsch, Harald Boettner, and Klaus Seibert "Low-power micromachined structures for gas sensors with improved robustness", Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); https://doi.org/10.1117/12.395637

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