Hybrid MOEMS approaches for fiber optic switches and switch matrices

Rolf Goering; Frank Wippermann; Kay Kubitz

doi:10.1117/12.396510

22 August 2000 Hybrid MOEMS approaches for fiber optic switches and switch matrices

Rolf Goering, Frank Wippermann, Kay Kubitz

Author Affiliations +

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396510
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

We have developed a novel concept for miniaturized fiber optic switches. It is base don microprisms moved into the path of one or several input beams which are de3flected hereby and directed to the output fibers. Coupling of the deflected light beams into the output fibers is achieved by microlens arrays. The overall optical system has been designed properly in order to minimize the switch dimensions and to obtain excellent optical parameters of the switches. Piezoelectric bending actuators with a characteristic translation range of > 0.5 mm have been sued for the microprism movement. First switch prototypes are characterized by excellent optical parameters and short switching time. Several methods for system integration have been developed and applied to prototype fabrication. The first important process is the integration of fiber arrays with microlens arrays. A special mounting procedure has been developed for this. The second critical integration process is the mounting procedure of the prisms to the bending actuators. For this purpose a special vacuum gripper has been built. With the help of this gripper all microprisms can be mounted in one step.

Citation Download Citation

Rolf Goering, Frank Wippermann, and Kay Kubitz "Hybrid MOEMS approaches for fiber optic switches and switch matrices", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396510

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