18 August 2000
Prospective technology for system-on-a-chip: N2 implant followed by VHP O2 reoxidation
Tien-Ying Luo, Husam N. Al-Shareef, George A. Brown, Victor H. C. Watt, Arun Karamcheti, Mike D. Jackson, Howard R. Huff, Bob Evans, Chongmok Lee, Hong-Fa Luan, Dim-Lee Kwong
Author Affiliations +
Tien-Ying Luo,1 Husam N. Al-Shareef,2 George A. Brown,2 Victor H. C. Watt,2 Arun Karamcheti,2 Mike D. Jackson,2 Howard R. Huff,2 Bob Evans,3 Chongmok Lee,4 Hong-Fa Luan,4 Dim-Lee Kwong4
1Univ. of Texas at Austin and International SEMATECH (United States)
2International SEMATECH (United States)
3Gasonics International (United States)
4Univ. of Texas at Austin (United States)