Frequency tunable micromachined rf oscillators

Yee Chong Loke; Kim Miao Liew; Q. Zou; Ai Qun Liu

doi:10.1117/12.404898

20 October 2000 Frequency tunable micromachined rf oscillators

Yee Chong Loke, Kim Miao Liew, Q. Zou, Ai Qun Liu

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404898
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significant factor in affecting the flat passband of the filter and will be further analyzed in this paper.

Citation Download Citation

Yee Chong Loke, Kim Miao Liew, Q. Zou, and Ai Qun Liu "Frequency tunable micromachined rf oscillators", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404898

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