Paper
6 October 2000 Composite material for forming microstructural elements
Lin Pang, Yingbai Yan, Haitao Liu, Guofan Jin
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402774
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
Abstract
Composite recording material was synthesized by hydrolysis and polycondensation of tetraethoxyorthosilicate and silane with photoinitiator added. With infrared spectral, the mechanism of response to light of the material was investigated. Vibrational spectroscopy is used to provide insight into the structure changes that occur when films are exposed with UV light. The decrease of absorption intensity in v(C = O) 1698 cm-1 and v(C = C) 1636 cm-1 bands reveal the polymerization in material after irradiation. Comparative experiments between two systems with mixed initiation and sole initiation are exported. UV spectra show that the transmittance of the sol-gel thin films drops down in a wavelength range of UV with addition of photoinitiator and irradiation. Developed in dilute base solution, micro-optical elements, such as gratings, were fabricated by contact copy with UV-exposure.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lin Pang, Yingbai Yan, Haitao Liu, and Guofan Jin "Composite material for forming microstructural elements", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402774
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KEYWORDS
Composites

Chemical elements

Polymerization

Transmittance

Ultraviolet radiation

Sol-gels

Photoresist materials

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