Paper
21 May 2001 Whispering-gallery-mode evanescent-wave microsensor for trace-gas detection
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Abstract
A prototype evanescent-wave sensor using resonant whispering-gallery modes of a fused-silica microsphere has been developed and is being applied to the detection of trace amounts of carbon dioxide, carbon monoxide, ammonia, and acetylene in the 1530 - 1580 nm wavelength region. Its sensitivity is comparable to that of typical multipass-cell systems, but our sensor is much more compact because of resonant cavity enhancement. It represents a significant improvement over current total-internal-reflection or fiber evanescent-wave sensors, owing to the longer effective absorption path length (tens of meters in a sphere less than a millimeter in diameter). The present sensitivity is about a hundred parts per million, equivalent to the level detected by a household carbon monoxide sensor. This sensitivity is for direct absorption measurements; wavelength-modulation spectroscopy is being implemented and should provide two or three orders of magnitude improvement. By extending the same techniques, using fluorozirconate- glass microspheres and stronger transitions in the mid- infrared, the sensitivity is expected to improve to about a part per billion.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Albert T. Rosenberger and Jeromy P. Rezac "Whispering-gallery-mode evanescent-wave microsensor for trace-gas detection", Proc. SPIE 4265, Biomedical Instrumentation Based on Micro- and Nanotechnology, (21 May 2001); https://doi.org/10.1117/12.427962
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Cited by 37 scholarly publications.
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KEYWORDS
Absorption

Sensors

Carbon monoxide

Optical spheres

Microsensors

Molecules

Signal detection

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