AlGaN Schottky diodes for short-wavelength UV applications

Peter P. Chow; Jody J. Klaassen; Robert E. Vest; James M. Van Hove; Andrew M. Wowchak; Christina Polley

doi:10.1117/12.429410

12 June 2001 AlGaN Schottky diodes for short-wavelength UV applications

Peter P. Chow, Jody J. Klaassen, Robert E. Vest, James M. Van Hove, Andrew M. Wowchak, Christina Polley

Proceedings Volume 4288, Photodetectors: Materials and Devices VI; (2001) https://doi.org/10.1117/12.429410
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

High performance ultraviolet (UV) detectors have been fabricated using plasma-enhanced molecular beam epitaxy. The realized AlGaN Schottky detectors exhibit high responsivity, sharp spectral cutoff and high shunt resistance of several giga-ohms for 0.5 mm² active area devices. Quantitative measurements have been carried out on these detectors in the photon energy range from < 1 to > 10 eV (from approximately 1200 to 120 nm in wavelength). Very short UV spectral measurement of these AlGaN detectors is reported for the first time using high intensity sources. The detectors exhibited almost eight orders of magnitude in response dynamic range in that spectral span. Reliability of the devices is evaluated after exposure to repeated DUV irradiation.

Citation Download Citation

Peter P. Chow, Jody J. Klaassen, Robert E. Vest, James M. Van Hove, Andrew M. Wowchak, and Christina Polley "AlGaN Schottky diodes for short-wavelength UV applications", Proc. SPIE 4288, Photodetectors: Materials and Devices VI, (12 June 2001); https://doi.org/10.1117/12.429410

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