Multiple-anion nonvolatile acetal (MANA) resists

Jeffrey M. Guevremont; Robert L. Brainard; Scott D. Reeves; Xin Zhou; Thinh B. Nguyen; Joseph F. Mackevich; Erik H. Anderson; Gary N. Taylor

doi:10.1117/12.436655

20 August 2001 Multiple-anion nonvolatile acetal (MANA) resists

Jeffrey M. Guevremont, Robert L. Brainard, Scott D. Reeves, Xin Zhou, Thinh B. Nguyen, Joseph F. Mackevich, Erik H. Anderson, Gary N. Taylor

Author Affiliations +

Proceedings Volume 4343, Emerging Lithographic Technologies V; (2001) https://doi.org/10.1117/12.436655
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

New acetal or ketal blocking reagents were investigated for use in e-beam lithography and compared with the performance of ethyl vinyl either (EVE). Three blocking groups, (alpha) -Angelicalactone (AL), 6-methylene-5,6-benzo-1,4- dioxane (MBD), and MANA50 (an undisclosed blocking group used to show the potential of this chemistry) were reacted with poly(p-hydroxystyrene) (PHS) under acid catalyzed conditions to form AL-PHS, MBD-PHS, MANA50-PHS. The performance objectives pursued in the design of these new materials was to use acetal (ketal) chemistry to deliver wide process latitudes (e.g. good PED performance and minimal PEB sensitivity), use high molecular weight blocking groups to eliminate outgassing, and use the novel concept of multiple anions to deliver lithographic performance. These new materials are called Multiple Anion Nonvolatile Acetal (MANA) resists. Resists films were exposed with 50kV electrons, post exposure baked (PEB), and developed with 0.26 N TMAH. Resists prepared with the third blocking group, MANA50, gave contrast and imaging performance independent of PEB humidity and were relatively insensitive to PEB temperature and post exposure delay (PED). These resists gave the best resolution (90 nm) and profiles of all the materials tested, as well as showing no outgassing (as measured by film thickness loss).

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Jeffrey M. Guevremont, Robert L. Brainard, Scott D. Reeves, Xin Zhou, Thinh B. Nguyen, Joseph F. Mackevich, Erik H. Anderson, and Gary N. Taylor "Multiple-anion nonvolatile acetal (MANA) resists", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); https://doi.org/10.1117/12.436655

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