Br lamp for F2 laser wavelength calibration

Masaki Yoshioka; Tetsuya Kitagawa; Tomoyoshi Arimoto; Hiromitsu Matsuno; Tatsumi Hiramoto; Toru Suzuki; Kazuaki Hotta

doi:10.1117/12.435659

14 September 2001 Br lamp for F₂ laser wavelength calibration

Masaki Yoshioka, Tetsuya Kitagawa, Tomoyoshi Arimoto, Hiromitsu Matsuno, Tatsumi Hiramoto, Toru Suzuki, Kazuaki Hotta

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435659
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

Recently, we have developed a novel Br lamp for the F₂ laser wavelength calibration. In order to examine the validity of this lamp, we measured emission lines of this lamp in 157 nm region and analyzed them. From our result, it has been confirmed that the spectral profile of the 157.6387 nm (²P_3/2 - ⁴P_5/2) emission line of Br atom is unchangeable to the parameters of lamp designs and lamp operating conditions. One of the reasons will be shown here. Hence our novel Br lamp is to be the promising candidate for the 157 nm F₂ laser wavelength calibration.

Citation Download Citation

Masaki Yoshioka, Tetsuya Kitagawa, Tomoyoshi Arimoto, Hiromitsu Matsuno, Tatsumi Hiramoto, Toru Suzuki, and Kazuaki Hotta "Br lamp for F₂ laser wavelength calibration", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435659

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available