Thermal and mechanical evaluation of micromachined planar spiral inductors

Renato P. Ribas; Jerome Lescot; Jean Louis Leclercq; Bernard Courtois

doi:10.1117/12.425369

5 April 2001 Thermal and mechanical evaluation of micromachined planar spiral inductors

Renato P. Ribas, Jerome Lescot, Jean Louis Leclercq, Bernard Courtois

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425369
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

Micromachined planar spiral inductors and transformers have been largely proposed for RF applications, using MEMS processes. Q-factors and self-resonant frequencies have been significantly increased by suspending such structures. However, thermal and mechanical properties are somewhat compromised. In this paper, a complete analysis of such parameters is presented through extensive finite element method (FEM) simulations. Partially released structure is proposed to avoid these troubles.

Citation Download Citation

Renato P. Ribas, Jerome Lescot, Jean Louis Leclercq, and Bernard Courtois "Thermal and mechanical evaluation of micromachined planar spiral inductors", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425369

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