Influence of aberrations on the image quality of subtle periodic structures in case of high entrance numerical apertures

Alexander V. Belozubov

doi:10.1117/12.451304

21 December 2001 Influence of aberrations on the image quality of subtle periodic structures in case of high entrance numerical apertures

Alexander V. Belozubov

Author Affiliations +

Proceedings Volume 4436, Wave-Optical Systems Engineering; (2001) https://doi.org/10.1117/12.451304
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

The numerical modeling of influence of aberrations on pictur quality of thin periodic structures with taking into account a high entrance numerical aperture (NA) on the basis of the vector theory of diffraction is presented. The simulation algorithm and brief theoretical considerations are discussed. It is shown the influence of the entrance NA on image quality of microscope objectives is different for various values of NA and the contrast increases with the higher entrance NA.

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Alexander V. Belozubov "Influence of aberrations on the image quality of subtle periodic structures in case of high entrance numerical apertures", Proc. SPIE 4436, Wave-Optical Systems Engineering, (21 December 2001); https://doi.org/10.1117/12.451304

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