Phase-shifting AFM moire method

Anand Krishna Asundi; Huimin Xie; Jin Yu; Zhaowei Zhong

doi:10.1117/12.449366

26 November 2001 Phase-shifting AFM moire method

Anand Krishna Asundi, Huimin Xie, Jin Yu, Zhaowei Zhong

Proceedings Volume 4448, Optical Diagnostics for Fluids, Solids, and Combustion; (2001) https://doi.org/10.1117/12.449366
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

In this paper, a phase shifting technique for atomic force microscope (AFM) scanning moire method is proposed. The phase shifting is realized in four steps from 0 to 2π by a piezo-scanner in AFM. The measurement method and experimental techniques are described in detail. For demonstration, this method is applied to determine the phase distribution in AFM moire of a 1200 lines/mm holographic grating used to measure thermal deformation in a QFP electronic package.

Citation Download Citation

Anand Krishna Asundi, Huimin Xie, Jin Yu, and Zhaowei Zhong "Phase-shifting AFM moire method", Proc. SPIE 4448, Optical Diagnostics for Fluids, Solids, and Combustion, (26 November 2001); https://doi.org/10.1117/12.449366

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