Spectroscopical investigation of plasma parameters in a RF alpha-discharge CO2+N2+He gas mixtures

V. V. Azharonok; I. I. Filatova; V. D. Shimanovich; L. N. Orlov; J. I. Necrashevich

doi:10.1117/12.459407

19 March 2002 Spectroscopical investigation of plasma parameters in a RF α-discharge CO₂+N₂+He gas mixtures

V. V. Azharonok, I. I. Filatova, V. D. Shimanovich, L. N. Orlov, J. I. Necrashevich

Author Affiliations +

Proceedings Volume 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures; (2002) https://doi.org/10.1117/12.459407
Event: Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, 2002, Moscow, Russian Federation

Abstract

The spectroscopic parameters of transversal RF discharge in gas mixtures CO2 +N2 + He are investigated. It has been observed that the width of the shields in a capacity RF discharge in such mixtures is almost independent on the frequency of RF field; it sufficiently differs from the theoretical predictions. The spatial distribution of the neutral gas temperature in various gas mixtures has been measured and discussed. The influence of the small additives of water vapour on luminescence intensity and its spatial distribution is also discussed.

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V. V. Azharonok, I. I. Filatova, V. D. Shimanovich, L. N. Orlov, and J. I. Necrashevich "Spectroscopical investigation of plasma parameters in a RF α-discharge CO₂+N₂+He gas mixtures", Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); https://doi.org/10.1117/12.459407

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