Fast collisional capillary discharge source for soft x-ray production and applications

Giuseppe Tomassetti; Libero Palladino; Antonio Ritucci; Lucia Reale; Tania Limongi; Sergei V. Kukhlevsky; Jozef Kaiser; Francesco Flora; Luca Mezi

doi:10.1117/12.448460

14 November 2001 Fast collisional capillary discharge source for soft x-ray production and applications

Giuseppe Tomassetti, Libero Palladino, Antonio Ritucci, Lucia Reale, Tania Limongi, Sergei V. Kukhlevsky, Jozef Kaiser, Francesco Flora, Luca Mezi

Author Affiliations +

Proceedings Volume 4504, Applications of X Rays Generated from Lasers and Other Bright Sources II; (2001) https://doi.org/10.1117/12.448460
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We report on a fast soft x-ray source consisting in a high temperature small diameter plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x-ray microscopy applications and also with the aim of developing a soft x-ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO₂, as plasma medium, after the optimization of the discharge setup and electrical parameters.

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Giuseppe Tomassetti, Libero Palladino, Antonio Ritucci, Lucia Reale, Tania Limongi, Sergei V. Kukhlevsky, Jozef Kaiser, Francesco Flora, and Luca Mezi "Fast collisional capillary discharge source for soft x-ray production and applications", Proc. SPIE 4504, Applications of X Rays Generated from Lasers and Other Bright Sources II, (14 November 2001); https://doi.org/10.1117/12.448460

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