Holographic rapid access system for onboard testing of MEMS in microgravity

Valery Petrov

doi:10.1117/12.443017

2 October 2001 Holographic rapid access system for onboard testing of MEMS in microgravity

Valery Petrov

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443017
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Review of current and emerging methods of holography and speckle metrology is given. Onboard research by means of holography and speckle metrology is analyzed. Advanced holographic rapid access system (RAS) is presented. It is very simple, compact, portable, user-friendly and requires minimal hardware. Holographic RAS has several modifications and spin-offs. Ultra high resolution silver halide media are used in this RAS.

Citation Download Citation

Valery Petrov "Holographic rapid access system for onboard testing of MEMS in microgravity", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443017

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