Field-effect-based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical parameters

Michael J. Schoening; Arshak Poghossian; J. Walter Schultze; Hans Lueth

doi:10.1117/12.456950

22 February 2002 Field-effect-based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical parameters

Michael J. Schoening, Arshak Poghossian, J. Walter Schultze, Hans Lueth

Author Affiliations +

Proceedings Volume 4576, Advanced Environmental Sensing Technology II; (2002) https://doi.org/10.1117/12.456950
Event: Environmental and Industrial Sensing, 2001, Boston, MA, United States

Abstract

Sensor systems for multi-parameter detection in fluidics usually combine different sensors, which are designed to detect either a physical or (bio-)chemical parameter. Therefore, such systems include a more complicated fabrication technology and measuring set-up. In this work, an ISFET (ion-sensitive field-effect transistor), which is well known as a (bio-)chemical sensor, is utilized as transducer for the detection of both (bio-)chemical and physical parameters. A multifunctional hybrid module for the determination of two (bio-)chemical parameters (pH, penicillin concentration) and three physical parameters (temperature, flow velocity and flow direction) using only two sensor structures, an ion generator and a reference electrode, is realized and its performance has been investigated. Here, a multifunctionality of the sensor system is achieved by means of different sensor arrangements and/or different operation modes. A Ta₂O₅-gate ISFET was used as transducer for all sensors. A novel time-of-flight type ISFET-based flow-velocity (flow rate) and flow-direction sensor using in-situ electrochemical generation of chemical tracers is presented. Due to the fast response of the ISFET (usually in the millisecond range), an ISFET-based flow sensor is suitable for the measurement of the flow velocity in a wide range. With regard to practical applications, pH measurements with this ISFET were performed in rain droplets.

Citation Download Citation

Michael J. Schoening, Arshak Poghossian, J. Walter Schultze, and Hans Lueth "Field-effect-based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical parameters", Proc. SPIE 4576, Advanced Environmental Sensing Technology II, (22 February 2002); https://doi.org/10.1117/12.456950

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