High-resolution micro-moire methods: principles and applications

Anand Krishna Asundi; Huimin Xie; Chai Gin Boay

doi:10.1117/12.447352

30 October 2001 High-resolution micro-moire methods: principles and applications

Anand Krishna Asundi, Huimin Xie, Chai Gin Boay

Proceedings Volume 4596, Advanced Photonic Sensors and Applications II; (2001) https://doi.org/10.1117/12.447352
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

In this paper, the electron beam moire method and AFM scanning moire method are proposed to measure in-plane deformation in micro-scale. The measurement principle and techniques of these two methods are discussed in detail. Additionally, the phase shifting AFM moire method is advanced. The methods are used to measure the thermal deformation in the BGA and QFP electronic packages. The successful results verify the electron beam moire and AFM moire methods are effective tools for measuring micro-scale deformation.

Citation Download Citation

Anand Krishna Asundi, Huimin Xie, and Chai Gin Boay "High-resolution micro-moire methods: principles and applications", Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); https://doi.org/10.1117/12.447352

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