Preparation of the SnO2 gate pH-ISFET by sol gel technology

Jung Chuan Chou; Yii Fang Wang

doi:10.1117/12.444656

15 October 2001 Preparation of the SnO₂ gate pH-ISFET by sol gel technology

Jung Chuan Chou, Yii Fang Wang

Proceedings Volume 4600, Advances in Microelectronic Device Technology; (2001) https://doi.org/10.1117/12.444656
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

In this paper, the sol-gel prepared SnO₂ thin film is first applied for the pH sensing. We use the SnCl₂(DOT)2H₂O as the precursor. It is cheaper than other methods. The resulting solution is dropped on the gate of the SiO₂ gate pH-ISFET (ion sensitive field effect transistor). After baking, the thin film will convert to SnO₂. We also use the thermal evaporation system to prepare the SnO₂ gate MOSFET. Then, we use the Keithley 236 instrument to measure the I_DS-V_G curves of the SnO₂ gate MOSFET and pH-ISFET for the different pH buffer solutions. Since the MOSFET and pH-ISFET are fabricated on the same silicon wafer, the properties of these devices are identical. Therefore, we can use the experimental results and theoretical model of the pH-ISFET to find the pH sensitivity and pH_PZC (pH at the point of zero charge) of the sol-gel prepared SnO₂ gate pH-ISFET, which are about 57.36 mV/pH and 11.3, respectively.

Citation Download Citation

Jung Chuan Chou and Yii Fang Wang "Preparation of the SnO₂ gate pH-ISFET by sol gel technology", Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); https://doi.org/10.1117/12.444656

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available