Design of thin-film-based microgrippers

Weiming Huang; Xiangyang Gao; Jun Ping Tan

doi:10.1117/12.444741

15 October 2001 Design of thin-film-based microgrippers

Weiming Huang, Xiangyang Gao, Jun Ping Tan

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444741
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

In this paper, we present the results of theoretical study of thin film technique based micro grippers. Three most popular actuation mechanisms, namely, piezoelectric, bimetal and shape memory alloy are investigated. First, we present the simulation results against the measured behavior of NiTi shape memory alloy thin film based micro grippers. Then we compare the performances of these three kinds of micro grippers. It shows that shape memory alloy based micro gripper is much better than the others.

Citation Download Citation

Weiming Huang, Xiangyang Gao, and Jun Ping Tan "Design of thin-film-based microgrippers", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444741

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