A polydimethylsiloxane (PDMS) stamp with well-defined features on its surface was fabricated through soft lithography. First, we intended to increase the molecular interaction between the PDMS materials and its supporting substrate through surface modification with self-assembly technique. A silane molecular monolayer has been produced on a glass plate by treatment with 5% (CH3)2SiCl2 in CH3Cl. Secondary, we optimized the thickness of the PDMS stamps between 6x10-4m and 1.0x10-3m, and the feature highness 1.5x10-5m, and thus the stamp shrinkage could be controlled within 0.0417% in linearity or within 0.286% in area, respectively. Third, we modified the surface of the master through chemical plating silver or aluminum to prevent the PDMS from sticking to the master surface. During curing process of the stamp fabrication, PDMS intends to shrink towards the silanized glass plate from the master surface, which helps to peel stamp from the master without damaging its features.
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