Micromachined optical switch with a vertical SU-8 mirror

Suyan Liu; Minqiang Bu; Xiongying Ye; Zhaoying Zhou; Dacheng Zhang; Ting Li; Yilong Hao; Zhimin Tan

doi:10.1117/12.444734

15 October 2001 Micromachined optical switch with a vertical SU-8 mirror

Suyan Liu, Minqiang Bu, Xiongying Ye, Zhaoying Zhou, Dacheng Zhang, Ting Li, Yilong Hao, Zhimin Tan

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444734
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

In this paper, a novel surface micromachined optical switch with a micro vertical SU-8 mirror is reported. Using stress-induced bending of a polysilicon/silicon nitride bimorph beam, a vertical mirror is raised above the substrate. The beam with the mirror is attracted to the substrate by applying a voltage to switch the transmission state to the reflection state of the optical switch. The mirror displacement is about 250 micrometers . The roughness of the sidewall of the gold-coated SU-8 mirror is measured to be 53.5 A for the average roughness (Ra) and 71.3 A for the root mean square (rms). The verticality of the SU-8 mirror is 89.1 degree(s). The insertion loss is measured to be 2.9 dB in the transmission state and 4.1dB in the reflection state for multi-mode fibers. The structure of the switch provides us a possibility of expanding to a large matrix of optical switches.

Citation Download Citation

Suyan Liu, Minqiang Bu, Xiongying Ye, Zhaoying Zhou, Dacheng Zhang, Ting Li, Yilong Hao, and Zhimin Tan "Micromachined optical switch with a vertical SU-8 mirror", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444734

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