Structural optimization of NiTi/Si diaphragm used in micropumps

Li Wang; Jian Chen; Dong Xu; Bingchu Cai

doi:10.1117/12.444716

15 October 2001 Structural optimization of NiTi/Si diaphragm used in micropumps

Li Wang, Jian Chen, Dong Xu, Bingchu Cai

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444716
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Thin film shape memory alloy microactuators are the promising devices in MEMS. A kind of simple and effective micropump driven by bimorph thin film NiTi/Si diaphragm has been fabricated in our laboratory. This paper presents the optimization of the diaphragm structure with the finite element analysis package ANSYS. Maximum actuation deflections and stress distributions of five kinds of typical structures are analyzed. Simulation results show that patterned NiTi strips should be placed in the center of the silicon membrane to get uniform stress distribution, and there is an optimized distance between the boundaries of NiTi and Si to get maximum actuation deflection. The stress variances of NiTi films and silicon membranes in optimized structure during driving processes are limited in the range of elastic strain, which means the optimized NiTi/Si diaphragm structure has excellent actuation lifetime.

Citation Download Citation

Li Wang, Jian Chen, Dong Xu, and Bingchu Cai "Structural optimization of NiTi/Si diaphragm used in micropumps", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444716

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