Fabrication of beam sampling grating with electron-beam direct writing

Fuhua Gao; Yangsu Zeng; Shiwei Xie; Feng Gao; Jun Yao; Yongkang Guo; Jinglei Du; Zheng Cui

doi:10.1117/12.469296

3 June 2002 Fabrication of beam sampling grating with electron-beam direct writing

Fuhua Gao, Yangsu Zeng, Shiwei Xie, Feng Gao, Jun Yao, Yongkang Guo, Jinglei Du, Zheng Cui

Proceedings Volume 4659, Practical Holography XVI and Holographic Materials VIII; (2002) https://doi.org/10.1117/12.469296
Event: Electronic Imaging, 2002, San Jose, California, United States

Abstract

The beam sampling grating is one of the important diffractive optical elements used in the field of laser sampling. It can be considered as an off-axis, binary phase, Fresnel zone plate. Base don the theory of interference, the principle of the variable period grating formation process is analyzed perfectly and the transmissive function of the BSG is obtained. This paper repots to fabricate the BSG with electron-beam direct writing. Compared with the holographic method, the new method is simpler, cheaper, and more efficient to manufacture elements on a large scale.

Citation Download Citation

Fuhua Gao, Yangsu Zeng, Shiwei Xie, Feng Gao, Jun Yao, Yongkang Guo, Jinglei Du, and Zheng Cui "Fabrication of beam sampling grating with electron-beam direct writing", Proc. SPIE 4659, Practical Holography XVI and Holographic Materials VIII, (3 June 2002); https://doi.org/10.1117/12.469296

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