Impact of synchronization errors on overlay and CD control

Emmanuelle Luce; Sebastien Mougel; Pierre-Jerome Goirand; Jerome Depre

doi:10.1117/12.474634

30 July 2002 Impact of synchronization errors on overlay and CD control

Emmanuelle Luce, Sebastien Mougel, Pierre-Jerome Goirand, Jerome Depre

Proceedings Volume 4691, Optical Microlithography XV; (2002) https://doi.org/10.1117/12.474634
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

Quality of exposures on Step&Scan systems highly depends on stages synchronization. While scanning, wafer and reticle stages must have same relative speed (4x ratio) and directions. In this paper, we investigate the tolerance to lateral vibrations of 0.18micrometers and 0.12micrometers gate patterning respectively on an ASML PAS5500/750E scanner (KrF) and a PAS5500/900 scanner (ArF) exposure tools. Results should be given both on the MA impact on overlay and the MSD effect on CD control. But, as no adapted experimental method has been found to correlate overlay degradation to induced MA and then confirm the theory that 1nm of MA induces 1nm of translation, only results on CD control will be discussed, including lateral MSD impact on nominal CD variations, process latitudes degradations and intrafield CD dispersion. In particular, we will show that MSD effect on CD strongly differs from 248nm imaging process to 193nm one.

Citation Download Citation

Emmanuelle Luce, Sebastien Mougel, Pierre-Jerome Goirand, and Jerome Depre "Impact of synchronization errors on overlay and CD control", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); https://doi.org/10.1117/12.474634

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available