Modified Rayleigh equation: impact of image fluctuation on imaging performance

Seiji Matsuura; Takeo Hashimoto

doi:10.1117/12.474527

30 July 2002 Modified Rayleigh equation: impact of image fluctuation on imaging performance

Seiji Matsuura, Takeo Hashimoto

Proceedings Volume 4691, Optical Microlithography XV; (2002) https://doi.org/10.1117/12.474527
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The Rayleigh equation given by R equals k₁ X (lambda) /NA is often used to predict the resolution (R) of optical lithography. Since the design rule is approaching half of wavelength, however, lithographic performance imperfectly follows the Rayleigh equation. In other words, the constant k₁ does not represent the process difficulty expressed as contrast, exposure dose latitude, and mask error enhancement factor (MEEF). We propose a modified Rayleigh equation that considers the influence of image fluctuation on lithographic resolution, and confirmed that lithographic performance can be predicted more accurately by the modified equation than by the conventional equation. According to the modified equation, resolution will not be more enhanced than that predicted by the conventional Rayleigh equation, even if lens numerical aperture is increased.

Citation Download Citation

Seiji Matsuura and Takeo Hashimoto "Modified Rayleigh equation: impact of image fluctuation on imaging performance", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); https://doi.org/10.1117/12.474527

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