Coherent and optical methods of the diagnostics of periodic structures with the increasing sensitivity of measurements

A. M. Lyalikov; M. Yu. Serenko

doi:10.1117/12.468894

30 May 2002 Coherent and optical methods of the diagnostics of periodic structures with the increasing of the sensitivity of measurements

A. M. Lyalikov, M. Yu. Serenko

Author Affiliations +

Proceedings Volume 4749, ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine; (2002) https://doi.org/10.1117/12.468894
Event: XVII International Conference on Coherent and Nonlinear Optics (ICONO 2001), 2001, Minsk, Belarus

Abstract

The methods of visualization of both various defects of periodic structures and surface shape of periodic objects are considered. Experimental verification of the methods in the investigating of various transparent periodic objects is presented.

Citation Download Citation

A. M. Lyalikov and M. Yu. Serenko "Coherent and optical methods of the diagnostics of periodic structures with the increasing of the sensitivity of measurements", Proc. SPIE 4749, ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine, (30 May 2002); https://doi.org/10.1117/12.468894

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