Fabrication and modeling of the gray-scale mask-based aspheric refraction microlens array

Gou-Jen Wang; Shuh-Yi Wang; Chi-Hsian Chin

doi:10.1117/12.462882

19 April 2002 Fabrication and modeling of the gray-scale mask-based aspheric refraction microlens array

Gou-Jen Wang, Shuh-Yi Wang, Chi-Hsian Chin

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462882
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

In this research, the manufacturing processes of non- spherical refraction microles array by gray-scale mask is investigated. Compared to the conventional multi-lithography fabricating method, the gray-scale mask approach requires only a single lithography action to fabricate a non- spherical refraction microlens array. In the firs part of this research, we emphasize the gray-scale mask based microlens array fabrication processes through the UV-LIGA approach. Furthermore, a two-stage process-modeling scheme is proposed to reduce the time-consuming trial-and-error parameters tuning labor works. At the first stage, a multi- layer feedforward neural-network is employed to model the relationships between the diameter and height of the microlens are obtained, the surface profile of this microlens can be predicted by an empirical equation. The empirical equation is derived through the regressing analysis method with data points sampled from the real microlens surface profile. Experimental results demonstrate that the proposed two-stage scheme can precisely predict the surface profile of the gray-scale mask based microlens.

Citation Download Citation

Gou-Jen Wang, Shuh-Yi Wang, and Chi-Hsian Chin "Fabrication and modeling of the gray-scale mask-based aspheric refraction microlens array", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462882

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