Tolerance analysis and synthesis in microsystems

Christophe Germer; Ulli Hansen; H.-J. Franke; Stephanus Buettgenbach

doi:10.1117/12.462832

19 April 2002 Tolerance analysis and synthesis in microsystems

Christophe Germer, Ulli Hansen, H.-J. Franke, Stephanus Buettgenbach

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462832
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

The large variety of the technologies and physical, chemical or biochemical effects united in micro systems requires a new generation of quality assurance. An appropriate quality management should check all conceivable influences on the product and perform a complete tolerance synthesis based on its function and with regard to manufacturing and cost optimization. In the following, a new approach to function-oriented tolerance analysis and synthesis is presented. The Institutes for Engineering Design and Micro Technology in Braunschweig, Germany, have developed a computer program, which assists Design Engineers in tolerance analysis and synthesis in micro technology. This contribution presents the theoretical background of this software. For a better understanding two short MEMS examples are shown.

Citation Download Citation

Christophe Germer, Ulli Hansen, H.-J. Franke, and Stephanus Buettgenbach "Tolerance analysis and synthesis in microsystems", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462832

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