Light source fluctuation effect on confocal imaging system

Anand Krishna Asundi; Chongxiang Li; Yanfeng Zhang; Zhong Ping Fang

doi:10.1117/12.482183

4 September 2002 Light source fluctuation effect on confocal imaging system

Anand Krishna Asundi, Chongxiang Li, Yanfeng Zhang, Zhong Ping Fang

Proceedings Volume 4768, Novel Optical Systems Design and Optimization V; (2002) https://doi.org/10.1117/12.482183
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Confocal 3-D imaging technique is a newly developed technique and widely used in many fields of research and development. It is to utilize light intensity sensitive measuring technique. Confocal 3-D profile measurement system is widely used in high resolution inspection. For high precision 3-D imaging inspection in confocal measuring system, light source acts a very important role in system resolution and accuracy. In order to improve measuring repeatability and stability, to reduce measurement error, and to lower the light source stability requirement and cost, this paper studied light source fluctuation effect to confocal imaging measurement; deduced depth response model function; analyzed system error caused by light source fluctuation; and presented a new scheme to reduce the affection of light source fluctuation. Theoretical analysis and experiment result verified that light source fluctuation should be considered and eliminated in very high resolution confocal 3-D shape measurement system.

Citation Download Citation

Anand Krishna Asundi, Chongxiang Li, Yanfeng Zhang, and Zhong Ping Fang "Light source fluctuation effect on confocal imaging system", Proc. SPIE 4768, Novel Optical Systems Design and Optimization V, (4 September 2002); https://doi.org/10.1117/12.482183

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