Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate

Kenichi Hibino; Bozenko F. Oreb; Philip S. Fairman

doi:10.1117/12.472221

20 June 2002 Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate

Kenichi Hibino, Bozenko F. Oreb, Philip S. Fairman

Author Affiliations +

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472221
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Wavelength scanning interferometry allows the simultaneous measurement of the surface profile and the optical thickness variation of a parallel plate. However, it is necessary to evaluate the modulation frequencies of the signal and noise which depend on the optical thickness and dispersion of the test plate. New nineteen-sample, wavelength scanning algorithms allow variation in these parameters and give a measurement resolution of 1-2 nanometers rms. Measurement of a BK7 near-parallel plate of 250 mm diameter and 25 mm thickness was demonstrated in a Fizeau interferometer.

Citation Download Citation

Kenichi Hibino, Bozenko F. Oreb, and Philip S. Fairman "Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472221

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