Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask

Hyong Sik Won; Seok Ho Song; Pill Soo Kim; YooYong Lee

doi:10.1117/12.453920

25 November 2002 Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask

Hyong Sik Won, Seok Ho Song, Pill Soo Kim, YooYong Lee

Proceedings Volume 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials; (2002) https://doi.org/10.1117/12.453920
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Monolithic fabrication of submicrometer multiple-pitch gratings by use of a single computer-generated phase mask(CGPM) is proposed. The CGPM is a computer-generated Fourier hologram generating multiple diffracted beams with equal intensity from a single incident beam. The submicrometer grating periods differing by as little as a few angstroms are estimated with basis of multiple diffraction angles and it is compared with experimental results.

Citation Download Citation

Hyong Sik Won, Seok Ho Song, Pill Soo Kim, and YooYong Lee "Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask", Proc. SPIE 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials, (25 November 2002); https://doi.org/10.1117/12.453920

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