Paper
25 November 2002 Optical performance characterization of AWG devices using low coherence interferometer
Dongqing Cao, Ming Yan, Brian McGinnis, Tony J. Ticknor, Jane C. Lam, Wei Chen, Yung-Jui Chen
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Abstract
An optical low coherence interferometer was built and used to characterize the optical performance of planar arrayed-waveguide grating (AWG) devices. The phase error and amplitude distributions of individual waveguides in an AWG were extracted by sectioning individual interferograms from the low coherence interferometer. Using a large amount of oversampling to improve signal-to-noise in combination with Hilbert transformation method, phase errors of less than λ/300 in our AWG’s were achieved and correlated to fabrication variations from the waveguide device design. This was subsequently used to improve the performance of our devices. In addition, the group delay (GD) and chromatic dispersion (CD) were also derived from the measured phase error using a Fourier transform method. The derived GD and CD matched well with those directly measured from commercial chromatic dispersion equipment based on the phase modulation method. The relationship between the phase and amplitude errors with different frequencies and the variation of GD or CD will be discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dongqing Cao, Ming Yan, Brian McGinnis, Tony J. Ticknor, Jane C. Lam, Wei Chen, and Yung-Jui Chen "Optical performance characterization of AWG devices using low coherence interferometer", Proc. SPIE 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials, (25 November 2002); https://doi.org/10.1117/12.450904
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KEYWORDS
Waveguides

Critical dimension metrology

Phase measurement

Interferometers

Dispersion

Light emitting diodes

Coherence (optics)

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