Paper
24 February 2003 SiC optics for EUV, UV, and visible space missions
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Abstract
An overview of silicon carbide (SiC) materials is provided, focusing on reaction bonded (RB) SiC and its properties. The Miniature Infrared Camera and Spectrometer (MICAS) and Advanced Land Imager (ALI) SiC space instruments produced by SSGPO and flown under NASA's New Millennium Program are described, and some of the mission requirements associated with UV and extreme UV (EUV) applications are reviewed. Manufacturing options associated with SiC reflectors are reviewed and the optical performance demonstrated with these materials is presented. In order to review the suitability of these materials to UV and EUV missions microroughness and surface scatter results are shown.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph L. Robichaud "SiC optics for EUV, UV, and visible space missions", Proc. SPIE 4854, Future EUV/UV and Visible Space Astrophysics Missions and Instrumentation, (24 February 2003); https://doi.org/10.1117/12.459771
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Cited by 17 scholarly publications.
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KEYWORDS
Silicon carbide

Silicon

Surface finishing

Chemical vapor deposition

Bidirectional reflectance transmission function

Optics manufacturing

Mirrors

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