Optical tomography using confocal fan-beam illumination and its application to LCD panel inspection

Akira Ishii; Makoto Shimizu; Yoshitaka Imoto

doi:10.1117/12.467626

18 October 2002 Optical tomography using confocal fan-beam illumination and its application to LCD panel inspection

Akira Ishii, Makoto Shimizu, Yoshitaka Imoto

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467626
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

This paper describes optical tomography using oblique and confocal fan-beam illumination devised for transparent-layered objects. This 3-D imaging method has the advantage of area-at-a-time sensing and it is free from disturbances caused by defects on the object surface, compared with the conventional confocal microscopy based on point-by-point sensing and co-axial illumination. The method was applied to LCD panel inspection and was successful in efficiently detecting foreign substances between the constituent layers in LCD. Furthermore, it was robust against scratches and dust on the protection film surface of the LCD.

Citation Download Citation

Akira Ishii, Makoto Shimizu, and Yoshitaka Imoto "Optical tomography using confocal fan-beam illumination and its application to LCD panel inspection", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467626

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