Surface profile measurement of concave-shaped mirror using grating projection method

Masayuki Yamamoto; Masahito Tonooka; Toru Yoshizawa

doi:10.1117/12.467533

18 October 2002 Surface profile measurement of concave-shaped mirror using grating projection method

Masayuki Yamamoto, Masahito Tonooka, Toru Yoshizawa

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467533
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

Specular objects with large shape-change such as the concave-shaped mirror are used in the several industrial fields. However, concave-shaped mirror is difficult to measure the surface profile with non-contact method. In this paper, we describe the profile measurement method for concave-shaped mirror such as an ellipsoidal mirror and an aspherical mirror. This measurement method, based on the grating projection method, employed two cylinder-type gratings with different radius; measurement time is shorter than that of contact-method. The surface of ellipsoidal mirror, one of the concave-shaped mirrors, is measured and repeatability accuracy is evaluated.

Citation Download Citation

Masayuki Yamamoto, Masahito Tonooka, and Toru Yoshizawa "Surface profile measurement of concave-shaped mirror using grating projection method", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467533

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