New long trace profiler for aspheric optical surface metrology

Tiqiao Xiao; Shaojian Xia

doi:10.1117/12.471438

20 September 2002 New long trace profiler for aspheric optical surface metrology

Tiqiao Xiao, Shaojian Xia

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.471438
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A long trace profiler (LTP) is specially designed for the metrology of long aspheric optical surfaces and has been widely used in the fields of synchrotron radiation and astronomy. An LTP with an innovative design has been successfully developed at SSRF. An f-θ system based on phase plate diffraction collimation is employed for the first time. Effect of source instability and ambient factors on the precision is greatly reduced, compared to other LTPs now available. The scanning range is 350mm, precision better than 0.5μrad, static repeatability 0.1μrad. The profiler has been calibrated by a standard mirror from Chinese National Institute of Metrology.

Citation Download Citation

Tiqiao Xiao and Shaojian Xia "New long trace profiler for aspheric optical surface metrology", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.471438

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