Polar-coordinate laser writer: analysis of exposure dose distribution

Yongjun Xie; Zhenwu Lu; Fengyou Li; Zhicheng Weng

doi:10.1117/12.464067

20 September 2002 Polar-coordinate laser writer: analysis of exposure dose distribution

Yongjun Xie, Zhenwu Lu, Fengyou Li, Zhicheng Weng

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.464067
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In the single point laser direct writing (LDW) process, there are differences between the exposure dose distribution and the light intensity distribution, and the differences will bring the line profile errors. In this paper, the equations to calculate the exposure dose distribution for the polar coordinate laser direct writing system are presented. The differences between the exposure dose distribution and the light intensity distribution are discussed. The line profile in the photoresist after development is predicted. The experimental results agree well with the theoretical forecast.

Citation Download Citation

Yongjun Xie, Zhenwu Lu, Fengyou Li, and Zhicheng Weng "Polar-coordinate laser writer: analysis of exposure dose distribution", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.464067

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available