Research on photoelectric test and measurment for form and position error

Jinsong Xie

doi:10.1117/12.471692

20 September 2002 Research on photoelectric test and measurment for form and position error

Jinsong Xie

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.471692
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Structure and principles of a photoelectric test and measurement system for form and position error are described. A special optical system using laser beam characteristics was designed to ensure the uniformity of the scanning speed. To meet the requirements of the system a precision mechanical system a servo-control system and an computing and data processing system are designed. As a result a high-speed efficiency and high precision non-contact auto-test is realized. This is a promotion to the development of “advanced manufacture technology”.

Citation Download Citation

Jinsong Xie "Research on photoelectric test and measurment for form and position error", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.471692

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