Scaling method using laser inteference for microdisplacement measurement system

Xiaojin Zhu; Xinmin Qi; Yiqing Gao; Lihua Yuan

doi:10.1117/12.471709

20 September 2002 Scaling method using laser inteference for microdisplacement measurement system

Xiaojin Zhu, Xinmin Qi, Yiqing Gao, Lihua Yuan

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.471709
Event: Photonics Asia, 2002, Shanghai, China

Abstract

The accuracy of the micro-displacement feed detection and control is decided by the calibration of the system. On the basis of laser interference principle, a new scaling method is introduced. Combining hardware subdivision and software subdivision, the scaling system can calibrate the micro-displacement effectively. The scaling system is composed of optical interferometer, signal processing circuits and microprocessor. Experiments proved that it is feasible to rectify the micro-displacement system with laser interference. The resolution of the micro-displacement is better than 0.1 micron after it was revised.

Citation Download Citation

Xiaojin Zhu, Xinmin Qi, Yiqing Gao, and Lihua Yuan "Scaling method using laser inteference for microdisplacement measurement system", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.471709

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