Micromechanical variable optical attenuator based on EDM micromachining

Zhonghui Cao; Ye Yuan; Junfeng Bao; Xiaodong Wu

doi:10.1117/12.483177

10 September 2002 Micromechanical variable optical attenuator based on EDM micromachining

Zhonghui Cao, Ye Yuan, Junfeng Bao, Xiaodong Wu

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483177
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A micro-machined MEMS variable optical attenuator capable of greater than 40 dB dynamic range is described. The device consists of an electromagnetically actuated gold-coated silicon micro-mirror rotating around a 100 µm-diameter shaft and a miniature driven coil. Enabling technology is precision EDM machining and laser cutting. The attenuator is scalable to a discrete array to implement a WDM drop module of an add/drop multiplexer and allows the realization of high capacity cross-connects.

Citation Download Citation

Zhonghui Cao, Ye Yuan, Junfeng Bao, and Xiaodong Wu "Micromechanical variable optical attenuator based on EDM micromachining", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483177

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