Large-scale synthesis of single- and multiwalled carbon nanotubes by microwave CVD

Vijay K. Varadan; Jining Xie

doi:10.1117/12.473343

13 November 2002 Large-scale synthesis of single- and multiwalled carbon nanotubes by microwave CVD

Vijay K. Varadan, Jining Xie

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.473343
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Carbon nanotubes (CNTs) are an interesting class of nanostructures which can be thought of as arising from the folding layer of graphite (a graphene sheet) to form a hollow cylinder composed of carbon hexagons. However, practical applications are still limited by the intricate process of synthesis and the inability of present day methods for large scale production of carbon nanotubes. Moreover high quality nanotubes with functionalization capability with polymers are desired for polymer MEMS, Nanodevices and BioMEMS. In this paper, an innovative CVD approacah using microwave energy was developed for large scale production of single wall and multiwall carbon nanotubes (MWNTs). Straight and helical carbon nanotubes were obtained when acetylene decomposed over the cobalt catalyst at 700°C created by microwave field. The scanning electron microscopy (SEM) of microwave driven MWNTs revealed their homogeneous nature. The high resolution electron microscopy (HRTEM) showed typical MWNT has 26 layers. The average diameter of the tubes was observed 20-30 nm. Electronc microscope observations showed higher yield of nanotubes obtained from microwave CVD than thermal filament CVD method.

Citation Download Citation

Vijay K. Varadan and Jining Xie "Large-scale synthesis of single- and multiwalled carbon nanotubes by microwave CVD", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.473343

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