Paper
8 July 2003 Interferometric system with resolution better than coherence length for determination of geometrical thickness and refractive index of a layer object
Dmitry V. Lyakin, Mickail I. Lobachev, Vladimir P. Ryabukho, Valery V. Tuchin
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Abstract
The idea of a new low coherence interferometric system with axial resolution better than coherence length providing simultaneous measurement of the geometrical thickness and refractive index of transparent layers by sharp focusing of light on the measured object is considered. The presented interferometric system consists of two parts -- the so-called Wave Front Matching Interferometer (WFMI) and a low coherence Michelson interferometer (LCMI) as a light source for the first. The WFMI provides high separation of interference signal peaks from demarcations in layer object at high numerical aperture focusing of light on the object. The tandem optical scheme of these interferometers allows to make this system very compact and mobile.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dmitry V. Lyakin, Mickail I. Lobachev, Vladimir P. Ryabukho, and Valery V. Tuchin "Interferometric system with resolution better than coherence length for determination of geometrical thickness and refractive index of a layer object", Proc. SPIE 4956, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine VII, (8 July 2003); https://doi.org/10.1117/12.477798
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Cited by 2 scholarly publications and 43 patents.
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KEYWORDS
Interferometers

Refractive index

Interferometry

Light sources

Mirrors

Michelson interferometers

Wavefronts

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